Domestic Step Profiler

Zhongtu Instrument's NS Series Domestic Step Profiler utilizes LVDC capacitive sensors, featuring sub-angstrom resolution and ultra-micro force measurement capabilities. It is primarily used for measuring microscopic topography parameters such as step height, film thickness, and surface roughness.

Working Process

The NS Series Domestic Step Profiler scans the sample surface using a diamond stylus with a 2μm radius while the sample is moved by an ultra-precision displacement stage. The vertical displacement of the stylus is converted into an electrical signal matching the feature size, which is then transformed into digital point cloud data. The point cloud data is displayed in the analysis software, where various analytical tools are used to obtain surface quality data such as step height or roughness.

The NS Series Domestic Step Profiler is an ultra-precision contact-based microscopic profile measuring instrument. It integrates core technologies such as ultra-low noise signal acquisition, ultra-fine motion control, and calibration algorithms, ensuring exceptionally high measurement accuracy and repeatability.

Product Features

1. Parameter Measurement Capabilities

1) Step Height: Capable of measuring step heights ranging from nanometers to 330μm or 1050μm. It can accurately measure materials deposited or removed during processes such as etching, sputtering, SIMS, deposition, spin coating, and CMP.

2) Roughness and Waviness: Can measure the roughness and waviness of samples. The analysis software calculates the scanned microscopic profile curve to obtain dozens of parameters related to roughness and waviness, including Ra, RMS, Rv, Rp, Rz, and more.

3) Stress Measurement: Capable of measuring surface stress for various materials.

2. Measurement Modes and Analysis Functions

1) Single-Area Measurement Mode: After focusing, set the scan starting point and scan length based on the image navigation map to begin measurement.

2) Multi-Area Measurement Mode: After focusing, configure a single-area scan path based on the image navigation map. Multiple scan paths can be arrayed horizontally and vertically to form a multi-area measurement mode, enabling automatic measurement of all scan paths with a single click.

3) 3D Measurement Mode: After focusing, configure a single-area scan path based on the image navigation map. The entire scan area can be set by defining the scan width or the spacing and number of scan lines. The entire scan area can be automatically scanned and reconstructed into a 3D image with a single click.

4) SPC Statistical Analysis: Supports analysis of various indicator parameters for different types of samples. Provides SPC charts for batch sample measurement data to track statistical trends.

3. Dual-Navigation Optical Imaging Function

The NS200-D model is equipped with a 5-megapixel color camera for top or oblique view. The top-view navigation system allows precise scan path setting, while the oblique-view navigation system enables real-time tracking of the scan trajectory.

4. Quick Stylus Replacement Function

Features a magnetic stylus design, allowing on-site quick replacement of scanning styli. The calibration module in the software ensures rapid calibration, maintaining accuracy and repeatability after replacement and reducing maintenance efforts.

Physical appearance of the magnetic stylus (330μm range)

The NS Series Step Profiler offers strong adaptability to various application scenarios. It has no special requirements for sample reflectivity, material type, or hardness, making it widely applicable in industries such as semiconductors, solar photovoltaics, optical processing, LED, MEMS devices, micro-nano material preparation, as well as research institutions and universities. Its accurate characterization of surface microscopic topography parameters is crucial for evaluating materials, analyzing performance, and improving processing techniques.

Typical Applications

Partial Technical Specifications

Please note: Due to market developments and product development needs, the content in this product documentation may be updated or modified at any time without prior notice. We appreciate your understanding.

If you have any questions or need more detailed information, please feel free to contact Zhongtu Instrument for consultation.